JPH0252032U - - Google Patents
Info
- Publication number
- JPH0252032U JPH0252032U JP13017688U JP13017688U JPH0252032U JP H0252032 U JPH0252032 U JP H0252032U JP 13017688 U JP13017688 U JP 13017688U JP 13017688 U JP13017688 U JP 13017688U JP H0252032 U JPH0252032 U JP H0252032U
- Authority
- JP
- Japan
- Prior art keywords
- working position
- blow
- clean air
- blowout
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13017688U JPH0252032U (en]) | 1988-10-03 | 1988-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13017688U JPH0252032U (en]) | 1988-10-03 | 1988-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0252032U true JPH0252032U (en]) | 1990-04-13 |
Family
ID=31385111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13017688U Pending JPH0252032U (en]) | 1988-10-03 | 1988-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0252032U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06159751A (ja) * | 1992-11-20 | 1994-06-07 | Shin Etsu Handotai Co Ltd | クリーンルームシステム |
-
1988
- 1988-10-03 JP JP13017688U patent/JPH0252032U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06159751A (ja) * | 1992-11-20 | 1994-06-07 | Shin Etsu Handotai Co Ltd | クリーンルームシステム |